Amorphous Silicon-Carbon-Fluorine Alloy Films
نویسندگان
چکیده
منابع مشابه
A near-wearless and extremely long lifetime amorphous carbon film under high vacuum
Prolonging wear life of amorphous carbon films under vacuum was an enormous challenge. In this work, we firstly reported that amorphous carbon film as a lubricant layer containing hydrogen, oxygen, fluorine and silicon (a-C:H:O:F:Si) exhibited low friction (~0.1), ultra-low wear rate (9.0 × 10(-13) mm(3) N(-1) mm(-1)) and ultra-long wear life (>2 × 10(6) cycles) under high vacuum. We systematic...
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